JV: Session taught by Joel Voldman
CL: Session taught by Carol Livermore
Lecture notes files.| LEC # | TOPICS | LECTURERS |
|---|
| 1 | Introduction to MEMS; microfabrication for MEMS: part I (PDF 1) (PDF 2) | JV/CL |
| 2 | Microfabrication for MEMS: part II (PDF - 1.3 MB) | CL |
| 3 | Microfabrication for MEMS: part III (PDF - 1.5 MB) | CL |
| 4 | Microfabrication for MEMS: part IV; in-class fab problem (PDF) | CL |
| 5 | Fabrication for the life sciences; material properties (PDF) | CL |
| 6 | Elasticity (PDF) or electronics I (PDF) | CL/JV |
| 7 | Structures (PDF) or electronics II (PDF) | CL/JV |
| 8 | Lumped-element modeling (PDF) | JV |
| 9 | Energy-conserving transducers (PDF) | JV |
| 10 | Dynamics, especially nonlinear (PDF) | JV |
| 11 | Structures special topics (PDF) | CL |
| 12 | Thermal energy domain; dissipation (PDF) | JV |
| 13 | Modeling dissipative processes (PDF) | JV |
| 14 | Fluids 1 (PDF) | JV |
| 15 | Fluids 2 (PDF) | JV |
| 16 | Mass transport in liquids (PDF - 1.3 MB) | JV |
| 17 | Feedback (PDF) | JV |
| 18 | Noise (PDF) | CL |
| 19 | Packaging (PDF - 1.0 MB) | CL |
| 20 | In-class design problem (PDF) | CL |
| 21 | Design tradeoffs (PDF - 1.5 MB) | CL |
| 22 | Power MEMS case study (PDF - 3.1 MB) | CL |
| 23 | Optical MEMS case study (PDF) | CL |
| 24 | Capacitive accelerometer case study (PDF - 1.4 MB) | JV |
| 25 | BioMEMS case study (PDF) | JV |
| Final presentations | |